Course detail

Thin Films

FCH-MCO_TVRAcad. year: 2009/2010

Terminology; fundamentals of vacuum science; introduction to plasma physics and chemistry; film deposition techniques: vacuum evaporation, sputtering, plasma polymerization, laser-enhanced CVD, CVD processes; thin film characterization: film growth, film thickness and deposition rate, scanning probe microscopy (STM, AFM, EFM, MFM, SNOM), mechanical properties (measurement techniques, internal stress, adhesion).

Language of instruction

Czech

Number of ECTS credits

4

Mode of study

Not applicable.

Guarantor

prof. RNDr. Vladimír Čech, Ph.D.

Department

Institute of Materials Science (ÚCHM)

Learning outcomes of the course unit

Students acquire basic knowledge about thin-film technology, characterization and application.

Prerequisites

Basic chemistry and physics.

Co-requisites

Not applicable.

Planned learning activities and teaching methods

Teaching methods depend on the type of course unit as specified in the article 7 of BUT Rules for Studies and Examinations.

Assesment methods and criteria linked to learning outcomes

Written test and oral exam.

Course curriculum

Introduction / information sources
Fundamentals of vacuum science
Introduction to plasma physics and chemistry
Physical vapor deposition
Chemical vapor deposition
Plasma-enhanced chemical vapor deposition
Film growth
Film thickness
Scanning probe microscopy
Mechanical properties
Chemical analysis of films
Film properties

Work placements

Not applicable.

Aims

Knowledge about advanced technologies and analyses of thin films is the aims of this subject.

Specification of controlled education, way of implementation and compensation for absences

Literature is recommended at the beginning of the semester. Knowledge about the subject is tested by written test and oral exam.

Recommended optional programme components

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

Eckertová L.: Fyzika tenkých vrstev. SNTL, Praha 1973. (CS)
Hoffman D., Singh B., Thomas J. H.: Handbook of Vacuum Science and Technology. Academic Press, San Diego 1998. (CS)
Mironov V. L.: Fundamentals of Scanning Probe Microscopy. Tekhnosfera, Moscow 2004. (CS)
Ohring M.: Materials Science of Thin Films. Academic Press, San Diego 2002. (CS)

Recommended reading

Not applicable.

Classification of course in study plans

  • Programme NPCP_CHM Master's

    branch NPCO_CHM , 1 year of study, summer semester, compulsory-optional
    branch NPCO_CHM , 2 year of study, summer semester, compulsory-optional

  • Programme NPCP_SCH Master's

    branch NPCO_SCH , 1 year of study, summer semester, compulsory-optional
    branch NPCO_SCH , 2 year of study, summer semester, compulsory-optional

  • Programme NKCP_CHM Master's

    branch NKCO_CHM , 1 year of study, summer semester, compulsory-optional
    branch NKCO_CHM , 2 year of study, summer semester, compulsory-optional

  • Programme NKCP_SCH Master's

    branch NKCO_SCH , 1 year of study, summer semester, compulsory-optional
    branch NKCO_SCH , 2 year of study, summer semester, compulsory-optional

  • Programme CKCP_CZV lifelong learning

    branch CKCO_CZV , 1 year of study, summer semester, compulsory-optional

Type of course unit

 

Lecture

26 hod., optionally

Teacher / Lecturer

prof. RNDr. Vladimír Čech, Ph.D.