Course detail

Thin Films

FCH-MC_TVRAcad. year: 2021/2022

Terminology; fundamentals of vacuum science; introduction to plasma physics and chemistry; film deposition techniques: vacuum evaporation, sputtering, plasma polymerization, laser-enhanced CVD, CVD processes; thin film characterization: film growth, film thickness and deposition rate, scanning probe microscopy (STM, AFM, EFM, MFM, SNOM), mechanical properties (measurement techniques, internal stress, adhesion).

Language of instruction

Czech

Number of ECTS credits

Mode of study

Not applicable.

Guarantor

prof. RNDr. Vladimír Čech, Ph.D.

Department

Institute of Materials Science (ÚCHM)

Learning outcomes of the course unit

Students acquire basic knowledge about thin-film technology, characterization and application. They can use this knowledge in their diploma thesis and later as technologists and researchers.

Prerequisites

Basic chemistry and physics.

Co-requisites

Not applicable.

Planned learning activities and teaching methods

The course uses teaching methods in form of Lecture - 2 teaching hours per week. The e-learning system (LMS Moodle) is available to teachers and students.

Assesment methods and criteria linked to learning outcomes

Entrance written test and oral exam are aimed at basic knowledge about thin film technologies and thin film characterization.

Course curriculum

1. Introduction / information sources
2. Fundamentals of vacuum science
3. Introduction to plasma physics and chemistry
4. Physical vapor deposition
5. Chemical vapor deposition
6. Plasma-enhanced chemical vapor deposition
7. Film growth
8. Film thickness measurement
9. Scanning probe microscopy
10. Mechanical properties
11. Case study
12. Case study
13. Written test, visit to laboratories

Work placements

Not applicable.

Aims

Knowledge about advanced technologies and analyses of thin films is the aims of this subject.

Specification of controlled education, way of implementation and compensation for absences

Participation at lectures is not mandatory.

Recommended optional programme components

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

D. Hoffman, B. Singh, J.H. Thomas, Handbook of Vacuum Science and Technology, Academic Press 1998 (CS)
L. Eckertová, Fyzika tenkých vrstev, SNTL 1973 (CS)
M. Ohring, Materials Science of Thin Films, Academic Press 2002 (CS)
V. L. Mironov, Fundamentals of Scanning Probe Microscopy, NT-MDT 2004 (CS)

Type of course unit

Guided consultation in combined form of studies

26 hod., optionally

Teacher / Lecturer

prof. RNDr. Vladimír Čech, Ph.D.

Lecture

26 hod., optionally

Teacher / Lecturer

prof. RNDr. Vladimír Čech, Ph.D.