Publication detail

Plasma polymer multilayers of organosilicones and their optical properties controlled by RF power

KONTÁROVÁ, S. ČECH, V.

Original Title

Type

abstract

Language

English

Original Abstract

Well-defined multilayered films were deposited from tetravinylsilane combining individual layers polymerized at different powers. A realistic model of the multilayer structure was used to analyze ellipsometric data and distinguish individual layers in the multilayered film, evaluate their thickness and optical constants. Dispersion dependences for the refractive index were well separated for each type of individual layer, if the thickness was decreased 500 - 25 nm, and corresponded to those of the single layer.

Keywords

Multilayer, plasma polymerization, ellipsometry, refractive index, extinction coefficient

Authors

KONTÁROVÁ, S.; ČECH, V.

Released

27. 12. 2010

Pages from

Pages to

Pages count

BibTex

@misc{BUT60978,
  author="Soňa {Kontárová} and Vladimír {Čech}",
  title="Plasma polymer multilayers of organosilicones and their optical properties controlled by RF power",
  booktitle="PSE 2010",
  year="2010",
  edition="1",
  pages="1--1",
  note="abstract"
}