Detail publikace

Plasma polymer multilayers of organosilicones and their optical properties controlled by RF power

KONTÁROVÁ, S. ČECH, V.

Originální název

Typ

abstrakt

Jazyk

angličtina

Originální abstrakt

Well-defined multilayered films were deposited from tetravinylsilane combining individual layers polymerized at different powers. A realistic model of the multilayer structure was used to analyze ellipsometric data and distinguish individual layers in the multilayered film, evaluate their thickness and optical constants. Dispersion dependences for the refractive index were well separated for each type of individual layer, if the thickness was decreased 500 - 25 nm, and corresponded to those of the single layer.

Klíčová slova

Multilayer, plasma polymerization, ellipsometry, refractive index, extinction coefficient

Autoři

KONTÁROVÁ, S.; ČECH, V.

Vydáno

27. 12. 2010

Strany od

Strany do

Strany počet

BibTex

@misc{BUT60978,
  author="Soňa {Kontárová} and Vladimír {Čech}",
  title="Plasma polymer multilayers of organosilicones and their optical properties controlled by RF power",
  booktitle="PSE 2010",
  year="2010",
  edition="1",
  pages="1--1",
  note="abstract"
}