Publication detail

Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane

PŘIKRYL, R. ČECH, V. ZAJÍČKOVÁ, L. VANĚK, J. JONES, F. BEHZADI, S.

Original Title

Type

journal article - other

Language

English

Original Abstract

Plasma-polymerized films of vinyltriethoxysilane were deposited by plasma-enhanced chemical vapour deposition using an RF (13.56 MHz) helical coupling plasma system operated in pulsed regime. An effective power was reduced using pulsed plasma in order to decrease the degree of cross-linking of plasma polymer, which resulted in a material of lower Young's modulus. The Young's modulus and hardness of films increased for an enlarging effective power from 5.6 (0.05 W) to 13.7 GPa (25 W) and from 0.8 to 1.7 GPa, respectively, if the time, when plasma is switched on, was fixed at 1 ms. The refractive index at a wavelength of 633 nm increased from 1.47 to 1.58 for those deposition conditions. Enlarging period the elastic modulus decreased for a constant power used.

Keywords

Nanoindentation, Ellipsometry, PACVD, Plasma polymer

Authors

PŘIKRYL, R.; ČECH, V.; ZAJÍČKOVÁ, L.; VANĚK, J.; JONES, F.; BEHZADI, S.

RIV year

2005

Released

11. 3. 2005

Publisher

Elsevier

Location

Germany, GAPA

ISBN

0257-8972

Periodical

Surface and Coatings Technology

Year of study

2005

Number

200

State

Swiss Confederation

Pages from

468

Pages to

471

Pages count

BibTex

@article{BUT45809,
  author="Radek {Přikryl} and Vladimír {Čech} and Lenka {Zajíčková} and Jan {Vaněk} and Frank {Jones} and Shasa {Behzadi}",
  title="Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane",
  journal="Surface and Coatings Technology",
  year="2005",
  volume="2005",
  number="200",
  pages="468--471",
  issn="0257-8972"
}