Detail publikace

Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane

PŘIKRYL, R. ČECH, V. ZAJÍČKOVÁ, L. VANĚK, J. JONES, F. BEHZADI, S.

Originální název

Typ

článek v časopise - ostatní, Jost

Jazyk

angličtina

Originální abstrakt

Plasma-polymerized films of vinyltriethoxysilane were deposited by plasma-enhanced chemical vapour deposition using an RF (13.56 MHz) helical coupling plasma system operated in pulsed regime. An effective power was reduced using pulsed plasma in order to decrease the degree of cross-linking of plasma polymer, which resulted in a material of lower Young's modulus. The Young's modulus and hardness of films increased for an enlarging effective power from 5.6 (0.05 W) to 13.7 GPa (25 W) and from 0.8 to 1.7 GPa, respectively, if the time, when plasma is switched on, was fixed at 1 ms. The refractive index at a wavelength of 633 nm increased from 1.47 to 1.58 for those deposition conditions. Enlarging period the elastic modulus decreased for a constant power used.

Klíčová slova

Nanoindentation, Ellipsometry, PACVD, Plasma polymer

Autoři

PŘIKRYL, R.; ČECH, V.; ZAJÍČKOVÁ, L.; VANĚK, J.; JONES, F.; BEHZADI, S.

Rok RIV

2005

Vydáno

11. 3. 2005

Nakladatel

Elsevier

Místo

Germany, GAPA

ISSN

0257-8972

Periodikum

Surface and Coatings Technology

Ročník

2005

Číslo

200

Stát

Švýcarská konfederace

Strany od

468

Strany do

471

Strany počet

BibTex

@article{BUT45809,
  author="Radek {Přikryl} and Vladimír {Čech} and Lenka {Zajíčková} and Jan {Vaněk} and Frank {Jones} and Shasa {Behzadi}",
  title="Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane",
  journal="Surface and Coatings Technology",
  year="2005",
  volume="2005",
  number="200",
  pages="468--471",
  issn="0257-8972"
}