Publication detail
Analysis of Annealed Thin Polymer Films Prepared from Dichloro(methyl)phenylsilane by Plasma Polymerization
ČECH, V.
Original Title
Analysis of Annealed Thin Polymer Films Prepared from Dichloro(methyl)phenylsilane by Plasma Polymerization
Type
journal article - other
Language
English
Original Abstract
Thin plasma polymer films were deposited from a mixture of dichloro(methyl)phenylsilane vapor and gaseous hydrogen in an RF capacitive coupling deposition system on pieces of silicon wafers.
Key words in English
thin films, plasma polymerization,thermogravimetric analysis, FTIR, ESCA/XPS
Authors
ČECH, V.
RIV year
2001
Released
1. 1. 2001
ISBN
0021-8995
Periodical
Journal of Applied Polymer Sciences
Year of study
82
Number
9
State
United States of America
Pages from
2106
Pages to
2112
Pages count
7
BibTex
@article{BUT39848,
author="Vladimír {Čech}",
title="Analysis of Annealed Thin Polymer Films Prepared from Dichloro(methyl)phenylsilane by Plasma Polymerization",
journal="Journal of Applied Polymer Sciences",
year="2001",
volume="82",
number="9",
pages="7",
issn="0021-8995"
}