Publication detail
Plasma-Polymerized Thin Films of Hexamethyldisiloxane Prepared at Low RF Power
BÁLKOVÁ, R., PŘIKRYL, R., SALYK, O.
Original Title
Plasma-Polymerized Thin Films of Hexamethyldisiloxane Prepared at Low RF Power
Type
conference paper
Language
English
Original Abstract
The plasma-polymerized HMDSO films were characterized by many techniques suitable to investigate their mechanical and thermal properties, and to determine composition, structure and surface morphology.
Key words in English
thin films, plasma polymerization, FTIR, ESCA/XPS, scratch test, modulus
Authors
BÁLKOVÁ, R., PŘIKRYL, R., SALYK, O.
RIV year
2001
Released
1. 1. 2001
Publisher
GREMI, CNRS/University of Orleans
Location
Orleans, France
Pages from
1747
Pages to
1753
Pages count
7
BibTex
@inproceedings{BUT3791,
author="Radka {Bálková} and Radek {Přikryl} and Ota {Salyk}",
title="Plasma-Polymerized Thin Films of Hexamethyldisiloxane Prepared at Low RF Power",
booktitle="15th Int. Symposium on Plasma Chemistry",
year="2001",
pages="7",
publisher="GREMI, CNRS/University of Orleans",
address="Orleans, France"
}