Publication detail

Film thickness measurement by optical profilometer MicroProf FRTMicroProf FRT

SIDEROV, V. MLADENOVA, D. YORDANOV, R. MILENKOV, V. OHLÍDAL, M. SALYK, O. WEITER, M. ZHIVKOV, I.

Original Title

Type

journal article - other

Language

English

Original Abstract

This paper compares Chromatic White Light (CWL) and stylus profilometer measurements in an attempt to determine the capabilities of the non-contact CWL method for thickness measurements of thin soft organic films. It was found that the CWL technique is proper for a measurement of thin soft organic films with higher than 40-50 nm film thicknesses. As a complementary feature of the method 2D and 3D surface morphology imaging of the films were recorded and processed by digital calculations and Fourier filtering.

Keywords

Chromatic White Light, Thin Soft Organic Films, Film Thickness Measurement

Authors

SIDEROV, V.; MLADENOVA, D.; YORDANOV, R.; MILENKOV, V.; OHLÍDAL, M.; SALYK, O.; WEITER, M.; ZHIVKOV, I.

RIV year

2013

Released

25. 11. 2013

Location

Bulgaria

ISBN

0324-1130

Periodical

BULGARIAN CHEMICAL COMMUNICATIONS

Year of study

Number

State

Republic of Bulgaria

Pages from

194

Pages to

197

Pages count

BibTex

@article{BUT102499,
  author="SIDEROV, V. and MLADENOVA, D. and YORDANOV, R. and MILENKOV, V. and OHLÍDAL, M. and SALYK, O. and WEITER, M. and ZHIVKOV, I.",
  title="Film thickness measurement by optical profilometer MicroProf FRTMicroProf FRT",
  journal="BULGARIAN CHEMICAL COMMUNICATIONS",
  year="2013",
  volume="45",
  number="B",
  pages="194--197",
  issn="0324-1130"
}