Publication detail

Thin Plasma Polymer Films of Hexamethyldisiloxane

PŘIKRYL, R., SALYK, O., BÁLKOVÁ, R., ČECH, V.

Original Title

Type

conference paper

Language

English

Original Abstract

Plasma enhanced chemical vapor technology was used to prepare thin polymer film from a vapor of hexamethyldisiloxane (HMDSO) monomer. An influence of deposition conditions on properties of films was observed. Plasma processes were diagnosticated employing the mass spectroscopy. Chemical composition and structure of prepared layers were studied by the infrared spectroscopy (FTIR) and the electron spectroscopy for chemical analysis (ESCA). Surface morphology of films was observed by the scanning electron microscopy (SEM), the profilometer Talystep and the atomic force microscopy (AFM).We measured the surface energy, evaluated the thermal stability using thermogravimetric analysis together with the mass spectroscopy and investigated an adhesion of films to substrates. Some mechanical properties were tested as well.

Key words in English

Plasma, Polymer, Hexamethyldisiloxane, Thin Film

Authors

PŘIKRYL, R., SALYK, O., BÁLKOVÁ, R., ČECH, V.

Released

1. 1. 2000

Publisher

MATFYZPRESS

Location

Praha

ISBN

80-85863-59-6

Book

Physics of Plasma and Ionized Media

Pages from

318

Pages to

322

Pages count

BibTex

@inproceedings{BUT9810,
  author="Radek {Přikryl} and Ota {Salyk} and Radka {Bálková} and Vladimír {Čech}",
  title="Thin Plasma Polymer Films of Hexamethyldisiloxane",
  booktitle="Physics of Plasma and Ionized Media",
  year="2000",
  pages="5",
  publisher="MATFYZPRESS",
  address="Praha",
  isbn="80-85863-59-6"
}