Publication detail
Mechanical properties of pulsed-plasma polymerized vinyltriethoxysilane
ČECH, V. GORUPPA, A. VANĚK, J. JONES, F.
Original Title
Mechanical properties of pulsed-plasma polymerized vinyltriethoxysilane
Type
conference paper
Language
English
Original Abstract
Plasma-polymerized thin films of vinyltriethoxysilane have been prepared by plasma-enhanced chemical vapor deposition using an RF (13.56 MHz) helical coupling pulsed-plasma system. Thin films of the thickness ranging from 80 nm to 1.5 um were subjected to nanoindentation measurements. The Youngs modulus determined from the indentation load-displacement curve has increased with the effective power used from 4 GPa to 11 GPa. Thin films have exhibited an abrupt increase of the hardness at the film surface.
Key words in English
VTEO, pulsed plasma, vinyltriethoxysilane, Young modulus
Authors
ČECH, V.; GORUPPA, A.; VANĚK, J.; JONES, F.
RIV year
2003
Released
1. 1. 2003
Publisher
Department of chemistry, University of Bari
Location
Bari
Pages from
461
Pages to
466
Pages count
6
BibTex
@inproceedings{BUT8362,
author="Vladimír {Čech} and Alexander {Goruppa} and Jan {Vaněk} and Frank {Jones}",
title="Mechanical properties of pulsed-plasma polymerized vinyltriethoxysilane",
booktitle="16th International Symposium on Plasma Chemistry",
year="2003",
pages="6",
publisher="Department of chemistry, University of Bari",
address="Bari"
}