Publication detail

Perspectives of a-SiOC:H thin films

ČECH, V.

Original Title

Type

lecture

Language

English

Original Abstract

We would like to introduce plasma polymerization as a technique capable to prepare high quality a-SiOC:H thin films with high reproducibility. The hydrogenated amorphous silicon oxycarbide (a-SiOC:H) thin film can be prepared using organosilicon precursors and physico-chemical properties of the film are controlled by deposition conditions. Development of tailored materials in a form of single films or layered structures has great potential for multicomponent, optical and electronic devices.

Keywords

thin film; plasma polymerization

Authors

ČECH, V.

Released

3. 10. 2005

Location

COST workshop Sant Feliu, Španělsko

BibTex

@misc{BUT64921,
  author="Vladimír {Čech}",
  title="Perspectives of a-SiOC:H thin films",
  year="2005",
  address="COST workshop
Sant Feliu, Španělsko",
  note="lecture"
}