Publication detail

Nanolayered composites of plasma polymer films

ČECH, V. TRIVEDI, R. ČECHALOVÁ, B. STUDÝNKA, J.

Original Title

Type

abstract

Language

English

Original Abstract

Well-defined nanolayered composites of plasma polymer films, deposited from tetravinylsilane monomer at different powers by plasma-enhanced chemical vapor deposition on silicon, were in-tensively studied by in situ spectroscopic ellipsometry, nanoindentation, and atomic force micros-copy. A realistic model of the composite structure was used to analyze ellipsometric data and dis-tinguish individual layers in the composite, evaluate their thickness and optical constants. Disper-sion dependences for the refractive index were well separated for each type of individual layer, if the thickness was decreased 315 - 25 nm, and corresponded to those of the single layer. A beveled section of the nanolayered composite revealed the individual layers that were extensively investi-gated by atomic force microscopy (AFM) using height (Fig. 1), magnitude, phase, lateral force, and atomic force acoustic microscopy (AFAM) modes. Nanoindentation measurements were carried out in order to evaluate selected mechanical properties of the nanolayered composite in normal direc-tion and individual layers as well.

Keywords

plasma polymerization; thin films; nanoindentation; ellipsometry

Authors

ČECH, V.; TRIVEDI, R.; ČECHALOVÁ, B.; STUDÝNKA, J.

Released

22. 12. 2009

Pages from

Pages to

Pages count

BibTex

@misc{BUT60921,
  author="Vladimír {Čech} and Rutul Rajendra {Trivedi} and Božena {Čechalová} and Jan {Studýnka}",
  title="Nanolayered composites of plasma polymer films",
  booktitle="Book of Abstracts, 4th Int. Workshop on Polymer_Metal Nanocomposites, Praha",
  year="2009",
  pages="1--1",
  note="abstract"
}