Publication detail

Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane

PŘIKRYL, R. ČECH, V. ZAJÍČKOVÁ, L. VANĚK, J. BEHZADI, S. JONES, F.

Original Title

Type

abstract

Language

English

Original Abstract

Plasma-polymerized films of vinyltriethoxysilane were deposited by plasma-enhanced chemical vapour deposition using an RF (13.56 MHz) helical coupling plasma system operated in pulsed regime. An effective power was reduced using pulsed plasma in order to decrease the degree of cross-linking of plasma polymer, which resulted in a material of lower Young's modulus. The Young's modulus and hardness of films increased for an enlarging effective power from 5.6 (0.05 W) to 13.7 GPa (25 W) and from 0.8 to 1.7 GPa, respectively, if the time, when plasma is switched on, was fixed at 1 ms. The refractive index at a wavelength of 633 nm increased from 1.47 to 1.58 for those deposition conditions. Enlarging period the elastic modulus decreased for a constant power used.

Keywords

Nanoindentation; Ellipsometry; [C] PACVD; [X] Plasma polymer

Authors

PŘIKRYL, R.; ČECH, V.; ZAJÍČKOVÁ, L.; VANĚK, J.; BEHZADI, S.; JONES, F.

Released

1. 1. 2004

Location

Německo

Pages from

160

Pages to

163

Pages count

BibTex

@misc{BUT60057,
  author="PŘIKRYL, R. and ČECH, V. and ZAJÍČKOVÁ, L. and VANĚK, J. and BEHZADI, S. and JONES, F.",
  title="Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane",
  booktitle="Proc. 9th Int. Conf. Plasma Surface Engineering (PSE 2004)",
  year="2004",
  pages="4",
  address="Německo",
  note="abstract"
}