Publication detail

Selective growth of metallic nanostructures on surfaces patterned by AFM local anodic oxidation

BARTOŠÍK, M. KOLÍBAL, M. ČECHAL, J. MACH, J. ŠIKOLA, T.

Original Title

Type

journal article - other

Language

English

Original Abstract

We report on an alternative approach for the fabrication of metallic nanostructures: a selective growth on silicon substrates patterned by local anodic oxidation using atomic force microscopy. Our method represents a maskless, four-step process which combines a top-down and bottom-up approach. The dimensions of both the oxide lines and metallic elements can be controlled during the technological process. In this paper we demonstrate the preparation of gallium and cobalt structures on silicon substrates but this method can be extended to other combinations of metals and substrates enabling thus the fabrication of ordered nanostructures of various compositions and properties on locally oxidized surfaces.

Keywords

Selective growth; Local anodic oxidation; Gallium; Patterning

Authors

BARTOŠÍK, M.; KOLÍBAL, M.; ČECHAL, J.; MACH, J.; ŠIKOLA, T.

RIV year

2009

Released

1. 10. 2009

ISBN

1533-4880

Periodical

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Year of study

Number

State

United States of America

Pages from

5887

Pages to

5890

Pages count

BibTex

@article{BUT48787,
  author="Miroslav {Bartošík} and Miroslav {Kolíbal} and Jan {Čechal} and Jindřich {Mach} and Tomáš {Šikola}",
  title="Selective growth of metallic nanostructures on surfaces patterned by AFM local anodic oxidation",
  journal="JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY",
  year="2009",
  volume="9",
  number="10",
  pages="5887--5890",
  issn="1533-4880"
}