Publication detail
AUTOMATION OF PE-CVD PROCESS FOR PREPARNG OF NANOSTRUCTURED FILMS
PŘIKRYL, R.
Original Title
AUTOMATION OF PE-CVD PROCESS FOR PREPARNG OF NANOSTRUCTURED FILMS
Type
journal article - other
Language
English
Original Abstract
Describes the automation of PE-CVD system used for preparing of nanostructured films of plasma polymer
Keywords
PE-CVD, Automation, plasma, deposition
Authors
PŘIKRYL, R.
RIV year
2008
Released
11. 9. 2008
Publisher
Chemické Listy
Location
Brno
ISBN
1213-7103
Periodical
Chemické listy
Year of study
102
Number
15
State
Czech Republic
Pages from
s1261
Pages to
s1262
Pages count
2
URL