Publication detail
Low Temperature Plasma for Surface Modification of Glass Substrates
PŘIKRYL, R., BÁLKOVÁ, R., SALYK, O., VANĚK, J.
Original Title
Low Temperature Plasma for Surface Modification of Glass Substrates
Type
conference paper
Language
English
Original Abstract
Plasma-enhanced chemical vapor deposition was used to prepare thin polymer films from hexamethyldisiloxane vapor.
Key words in English
plasma, mass spectroscopy, thin films, plasma polymerization
Authors
PŘIKRYL, R., BÁLKOVÁ, R., SALYK, O., VANĚK, J.
RIV year
2001
Released
1. 1. 2001
Publisher
Comenius University, Bratislava
Location
Bratislava
ISBN
8022315737
Book
13th Symposium on Application of Plasma Processes
Pages from
128
Pages to
129
Pages count
2
BibTex
@inproceedings{BUT3780,
author="Radek {Přikryl} and Radka {Bálková} and Ota {Salyk} and Jan {Vaněk}",
title="Low Temperature Plasma for Surface Modification of Glass Substrates",
booktitle="13th Symposium on Application of Plasma Processes",
year="2001",
pages="2",
publisher="Comenius University, Bratislava",
address="Bratislava",
isbn="8022315737"
}