Publication detail

Some factors that affect the surface measurement accuracy of a low-coherence interference microscope

LOVICAR, L. CHMELÍK, R. KOMRSKA, J. MATOUŠKOVÁ, V. KOLMAN, P. FORET, Z.

Original Title

Type

conference paper

Language

English

Original Abstract

Low-coherence interference microscopy (LCIM) is a powerful imaging high-accuracy technique for surface inspection and profiling. The principle of this technique is based on the interference of two waves with the use of incoherent light, usually of halogen lamp or superluminescent diode. One of its principal advantages is that both the image intensity and the image phase may be extracted from the output signal. The image phase may be converted subsequently into the surface height data. The image intensity is depth discriminated in a similar way as in the confocal microscopy. A limited lateral resolving power of the microscope significantly influences the accuracy of profiling with LCIM. This factor affects not only the image intensity of the reconstructed signal, but also behaviour of the image phase. It could result in an error in surface-height data measurement, especially if the structure contains details, the size of which is comparable with the resolving power of the microscope. This paper deals with the deviation of measurement of one-dimensional and two-dimensional periodic surface structures in relation to the numerical aperture of the objective lens and to the spectral composition of the illumination. The calculations are based on the polychromatic coherent transfer function, which describes the influence of temporal and spatial coherence of illumination on the imaging characteristics of the LCIM. Experiments were done with the reflected-light low-coherence holographic microscope

Keywords

low-coherence interference microscopy, holographic microscopy, optical sectioning, spectral composition, lateral resolving power

Authors

LOVICAR, L.; CHMELÍK, R.; KOMRSKA, J.; MATOUŠKOVÁ, V.; KOLMAN, P.; FORET, Z.

Released

12. 4. 2007

Publisher

SPIE-The International Society for Optical Engineering

Location

Bellingham, USA

ISBN

978-08-1946-748-5

Book

15th Czech-Polish-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics

Edition

Proceedings of SPIE

Pages from

660913

Pages to

660919

Pages count

BibTex

@inproceedings{BUT24892,
  author="Luděk {Lovicar} and Radim {Chmelík} and Jiří {Komrska} and Veronika {Matoušková} and Pavel {Kolman} and Zdeněk {Foret}",
  title="Some factors that affect the surface measurement accuracy of a low-coherence interference microscope",
  booktitle="15th Czech-Polish-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics",
  year="2007",
  series="Proceedings of SPIE",
  pages="7",
  publisher="SPIE-The International Society for Optical Engineering",
  address="Bellingham, USA",
  isbn="978-08-1946-748-5"
}