Publication detail

The formation and properties of porous-anodic-alumina-assisted metal-oxide 3-D nanofilms for use in advanced micro-devices

MOZALEV, A. BENDOVÁ, M. PYTLÍČEK, Z. HUBÁLEK, J.

Original Title

Type

abstract

Language

English

Original Abstract

For current generation of energy conversion, distribution and storage microdevices, researchers have advocated the use of 2-D films built up of nanowires or nanotubes. The making of more complex 3-D nanostructured materials is becoming the most competitive area of research, aiming at future materials with enhanced or unusual properties and devices with substantially improved performances. Our team has developed a new way to build versatile 3-D metal-oxide-metal nanostructures that merges the benefits of advanced nanocomposite inorganic materials with the flexibility of non-lithographic electrochemical technologies based on anodization of aluminium and on so-called porous-anodic-alumina-assisted anodizing of a variety of refractory metals. To demonstrate the capability of the approach, several types of 3-D nanofilms were synthesized on substrates via anodizing sputtered Al/Nb metal layers and additionally tailoring film parameters by combining post-anodizing chemical and heat treatments. The films are composed of an array of well-defined, size-tailored, long-aspect-ratio columnlike metal-oxide protrusions, 20-200 nm in diameter, self-directed in the alumina nanopores, up to 1 mm long, in some cases being also anchored to a lower solid portion of corresponding oxide, having graded oxygen composition [1]. A patterned noble-metal mesh-like layer is formed on the column tops via the original point electrodeposition technique; the non-anodized metal layer serves as the bottom electrode. For purpose-built applications, the alumina may be selectively dissolved away, and a patterned network of vertically aligned, bottom- and top-interconnected metal-oxide nanocolumns is derived, as shown schematically in Fig. 1. SEM, TEM, XRD, XPS, EDX and electrical/dielectric measurements have been employed to reveal the films’ formation-structure-property relationship and define the areas of their potential application. application.

Keywords

metal-oxide nanostructures, 3D films, porous-anodic-alumina-assisted anodizing

Authors

MOZALEV, A.; BENDOVÁ, M.; PYTLÍČEK, Z.; HUBÁLEK, J.

Released

17. 5. 2015

Location

17-21 May 2015, Madeira Island, Portugal

Pages from

Pages to

Pages count

159

BibTex

@misc{BUT119661,
  author="Alexander {Mozalev} and Mária {Bendová} and Zdeněk {Pytlíček} and Jaromír {Hubálek}",
  title="The formation and properties of porous-anodic-alumina-assisted metal-oxide 3-D nanofilms for use in advanced micro-devices",
  booktitle="Book of Abstracts of the VII Aluminium Surface, Science and Technology",
  year="2015",
  pages="41--41",
  address="17-21 May 2015, Madeira Island, Portugal",
  note="abstract"
}