Publication detail
Prvková analýza nečistoty z kontaktu
WASSERBAUER, J. ŠOUKAL, F.
Original Title
Prvková analýza nečistoty z kontaktu
English Title
Elemental analysis of contaminants from contact.
Type
report
Language
Czech
Original Abstract
Prvková analýza byla provedena na rastrovacím elektronovém mikroskopu ZEISS EVO LS 10 s energiově dispersním analyzátorem OXFORD X-Max 80 mm2.
English abstract
Elemental analysis was performed on a scanning electron microscope Zeiss EVO LS 10 with an energy dispersive analyzer OXFORD X-Max 80 mm2.
Keywords
Kontaminace, SEM, EDS.
Key words in English
Contaminants, SEM, EDS.
Authors
WASSERBAUER, J.; ŠOUKAL, F.
Released
22. 7. 2013
Pages from
1
Pages to
15
Pages count
15
BibTex
@techreport{BUT106328,
author="Jaromír {Wasserbauer} and František {Šoukal}",
title="Prvková analýza nečistoty z kontaktu",
year="2013",
pages="1--15"
}