Publication detail

Thin Film Deposition of HMDSO for Barrier Applications in Archaeological Artefacts Preservation

PROCHÁZKA, M. BLAHOVÁ, L. KRČMA, F.

Original Title

Type

abstract

Language

English

Original Abstract

This work is focused on protective HMDSO thin films for encapsulating cleaned metallic archaeological artefacts, preventing the corrosion from destroying these historical items. Thin films were deposited via PECVD method. For testing samples, oxygen transmission rate measurement was the most important one. FTIR and XPS analyses were performed to determine the composition of thin films. Optimal setup for barrier coatings was determined.

Keywords

thin film, oxygen transmission rate, HMDSO, barrier coatings

Authors

PROCHÁZKA, M.; BLAHOVÁ, L.; KRČMA, F.

Released

25. 8. 2013

Location

Budapest

ISBN

978-615-5270-04-8

Book

5th Central European Symposium on Plasma Chemistry – Book of Abstracts

Pages from

198

Pages to

199

Pages count

BibTex

@misc{BUT101814,
  author="Michal {Procházka} and Lucie {Janů} and František {Krčma}",
  title="Thin Film Deposition of HMDSO for Barrier Applications in Archaeological Artefacts Preservation",
  booktitle="5th Central European Symposium on Plasma Chemistry – Book of Abstracts",
  year="2013",
  pages="198--199",
  address="Budapest",
  isbn="978-615-5270-04-8",
  note="abstract"
}