Nanolayered composites of plasma polymer films

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angličtina

Well-defined nanolayered composites of plasma polymer films, deposited from tetravinylsilane monomer at different powers by plasma-enhanced chemical vapor deposition on silicon, were in-tensively studied by in situ spectroscopic ellipsometry, nanoindentation, and atomic force micros-copy. A realistic model of the composite structure was used to analyze ellipsometric data and dis-tinguish individual layers in the composite, evaluate their thickness and optical constants. Disper-sion dependences for the refractive index were well separated for each type of individual layer, if the thickness was decreased 315 - 25 nm, and corresponded to those of the single layer. A beveled section of the nanolayered composite revealed the individual layers that were extensively investi-gated by atomic force microscopy (AFM) using height (Fig. 1), magnitude, phase, lateral force, and atomic force acoustic microscopy (AFAM) modes. Nanoindentation measurements were carried out in order to evaluate selected mechanical properties of the nanolayered composite in normal direc-tion and individual layers as well.

plasma polymerization; thin films; nanoindentation; ellipsometry

ČECH, V.; TRIVEDI, R.; ČECHALOVÁ, B.; STUDÝNKA, J.

22. 12. 2009

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