Detail publikace

Deposition of Single Plasma-Polymerized Vinyltriethoxysilane Films and their Layered Structure

ČECH, V. VANĚK, J. DRZAL, L.

Originální název

Typ

článek v časopise - ostatní, Jost

Jazyk

angličtina

Originální abstrakt

Plasma polymer films of vinyltriethoxysilane were prepared at the same deposition conditions but different film thicknesses and analyzed with respect to deposition rate, surface morphology and selected mechanical properties. The mean deposition rate decreased from 190 to 105 nm min-1 and the RMS roughness increased from 0.1 to 17.5 nm with film thickness ranging from 15.8 nm to 8.4 _m. The RMS roughness correlated to film thickness and the roughening coefficient was 0.92. Depth profiles of the elastic modulus and hardness revealed the gradient character of the films with thickness of up to 0.5 _m and a layered structure of a thicker film. Results enabled the reconstruction of a thicker film (> 0.5 _m) as the layered structure, which consists of a gradient interlayer at the substrate, a relatively homogeneous layer as the bulk, and gradient overlayer at the film surface.

Klíčová slova

PE CVD, vinyltriethoxysilane, a-SiOC:H, nanoindentation, continuous stiffness measurement, AFM, RMS roughness, Young's modulus, hardness

Autoři

ČECH, V.; VANĚK, J.; DRZAL, L.

Rok RIV

2006

Vydáno

5. 12. 2006

ISSN

0021-4922

Periodikum

Japanese Journal of Applied Physics

Ročník

Číslo

10B

Stát

Japonsko

Strany od

8440

Strany do

8444

Strany počet

BibTex

@article{BUT43627,
  author="Vladimír {Čech} and Jan {Vaněk} and Lawrence {Drzal}",
  title="Deposition of Single Plasma-Polymerized Vinyltriethoxysilane Films and their Layered Structure",
  journal="Japanese Journal of Applied Physics",
  year="2006",
  volume="45",
  number="10B",
  pages="8440--8444",
  issn="0021-4922"
}