Detail publikace

Thin Film Deposition of HMDSO for Barrier Applications in Archaeology

PROCHÁZKA, M. BLAHOVÁ, L. KRČMA, F.

Originální název

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

Thin film chemical vapour deposition technique has been used for more than 50 years. Introducing organosilicones as precursors, e.g. hexamethyldisiloxane (HMDSO) or tetraethyl orthosilicate (TEOS), brought new possibilities to this method. Barrier properties of thin films have become an important issue, especially for army and emergency services as well as for food and drink manufacturers. Our work is focused on deposition of protective HMDSO thin films via plasma enhanced chemical vapour deposition for encapsulating cleaned archaeological artefacts, preventing these historical objects from destructive corrosion objects.

Klíčová slova

PECVD, barrier coating, HMDSO, OTR

Autoři

PROCHÁZKA, M.; BLAHOVÁ, L.; KRČMA, F.

Rok RIV

2014

Vydáno

26. 8. 2014

Místo

Belgrade

ISBN

978-86-7762-600-6

Kniha

Book of Contributed Papers of 27th Summer School and International Symposium on the Physics of Ionized Gases

Strany od

218

Strany do

221

Strany počet

BibTex

@inproceedings{BUT109505,
  author="Michal {Procházka} and Lucie {Janů} and František {Krčma}",
  title="Thin Film Deposition of HMDSO for Barrier Applications in Archaeology",
  booktitle="Book of Contributed Papers of 27th Summer School and International Symposium on the Physics of Ionized Gases",
  year="2014",
  pages="218--221",
  address="Belgrade",
  isbn="978-86-7762-600-6"
}