Detail publikace

Thickness measurement of thin soft organic films

MLADENOVA, D. SIDEROV, V. ZHIVKOV, I. SALYK, O. OHLÍDAL, M. YORDANOVA, I. YORDANOV, R. PHILIPPOV, P. WEITER, M.

Originální název

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

This paper compares chromatic white light (CWL) and interference microscope measurements aiming to find a proper non-contact method for a thickness determination of thin soft organic films. Standard samples with vacuum deposited aluminum films of different thicknesses in the range of 50-1000 nm were prepared and measured by both methods. It was found that the CWL technique is proper for a measurement of thin soft organic films with higher than 40-50 nm film thicknesses. As a complementary feature of the method 2D and 3D surface morphology imaging of the films could be recorded and the surface film roughness could be calculated. In a case of optical inhomogeneity the method requires covering with a uniform high reflective coating. The interference microscopy method results in a relatively lower film thickness with a higher standard deviation and a higher standard relative error. It could be connected with the resolution of the interferograms measured.

Klíčová slova

This soft organic films , Interference microscopy , Semiconductor device measurement , Surface morphology , Thickness measurement

Autoři

MLADENOVA, D.; SIDEROV, V.; ZHIVKOV, I.; SALYK, O.; OHLÍDAL, M.; YORDANOVA, I.; YORDANOV, R.; PHILIPPOV, P.; WEITER, M.

Rok RIV

2012

Vydáno

9. 5. 2012

Místo

Bad Aussee, Austria

ISBN

978-1-4673-2241-6

Kniha

Electronics Technology (ISSE), 2012 35th International Spring Seminar on

Strany od

367

Strany do

372

Strany počet

BibTex

@inproceedings{BUT99298,
  author="MLADENOVA, D. and SIDEROV, V. and ZHIVKOV, I. and SALYK, O. and OHLÍDAL, M. and YORDANOVA, I. and YORDANOV, R. and PHILIPPOV, P. and WEITER, M.",
  title="Thickness measurement of thin soft organic films",
  booktitle="Electronics Technology (ISSE), 2012 35th International Spring Seminar on",
  year="2012",
  pages="367--372",
  address="Bad Aussee, Austria",
  isbn="978-1-4673-2241-6"
}