Detail publikace

Characterization of pp-TVS films by spectroscopic ellipsometry

ČECHALOVÁ, B. STUDÝNKA, J. ČECH, V.

Originální název

Characterization of pp-TVS films by spectroscopic ellipsometry

Typ

audiovizuální tvorba

Jazyk

angličtina

Originální abstrakt

We have focused on characterization of plasma polymer films using spectroscopic ellipsometry in this work. The determination of dispersion curves of the refractive index and extinction coefficient for films deposited at different process parameters has been the primary aim of our study.

Klíčová slova

ellipsometry thin film plasma polymerization

Autoři

ČECHALOVÁ, B.; STUDÝNKA, J.; ČECH, V.

Vydáno

28. 11. 2006

Místo

Berlin

ISBN

3000187510

Edice

BAM

Číslo edice

2006

URL

http://www.ake.bam.de/workshop-ellipsometry-2006/index.html

BibTex

@misc{BUT63475,
  author="Božena {Čechalová} and Jan {Studýnka} and Vladimír {Čech}",
  title="Characterization of pp-TVS films by spectroscopic ellipsometry",
  year="2006",
  series="BAM",
  edition="2006",
  address="Berlin",
  isbn="3000187510",
  url="http://www.ake.bam.de/workshop-ellipsometry-2006/index.html",
  note="presentation"
}