Detail publikace

Perspectives of a-SiOC:H thin films

ČECH, V.

Originální název

Typ

abstrakt

Jazyk

angličtina

Originální abstrakt

We would like to introduce plasma polymerization as a technique capable to prepare high quality a-SiOC:H thin films with high reproducibility. The hydrogenated amorphous silicon oxycarbide (a-SiOC:H) thin film can be prepared using organosilicon precursors and physico-chemical properties of the film are controlled by deposition conditions. Development of tailored materials in a form of single films or layered structures has great potential for multicomponent, optical and electronic devices.

Klíčová slova

thin film; plasma polymerization

Autoři

ČECH, V.

Vydáno

1. 10. 2005

Místo

Sant Feliu, Španělsko

BibTex

@misc{BUT60278,
  author="Vladimír {Čech}",
  title="Perspectives of a-SiOC:H thin films",
  year="2005",
  address="Sant Feliu, Španělsko",
  note="abstract"
}