Detail publikace

FUNCTIONAL MULTILAYER COATINGS OF TETRAVINYLSILANE

STUDÝNKA, J. ČECHALOVÁ, B. ČECH, V.

Originální název

Typ

článek v časopise - ostatní, Jost

Jazyk

angličtina

Originální abstrakt

Functional coatings constructed as bi-layer or multilayer (10-layer) structures were deposited from pure tetravinylsilane monomer or a mixture of monomer and oxygen gas using plasma-enhanced chemical vapor deposition. Selected deposition conditions were used to deposit the plasma polymer layer of A and B type, which differ in chemical and physical properties markedly. The thickness of the particular layer in layered structure was 0.1 - 0.9 micron at a total coating thickness of 1 micron. Spectroscopic ellipsometry enabled us to differentiate the particular layers in structured coatings and analyze them.

Klíčová slova

multilayer, PECVD, tetravinylsilane, ellipsometry, FTIR

Autoři

STUDÝNKA, J.; ČECHALOVÁ, B.; ČECH, V.

Rok RIV

2008

Vydáno

22. 12. 2008

ISSN

0257-8972

Periodikum

Surface and Coatings Technology

Ročník

202

Číslo

Stát

Švýcarská konfederace

Strany od

5505

Strany do

5507

Strany počet

BibTex

@article{BUT48291,
  author="Jan {Studýnka} and Božena {Čechalová} and Vladimír {Čech}",
  title="FUNCTIONAL MULTILAYER COATINGS OF TETRAVINYLSILANE",
  journal="Surface and Coatings Technology",
  year="2008",
  volume="202",
  number="22",
  pages="5505--5507",
  issn="0257-8972"
}