Detail publikace

AFM and nanoindentation analysis of plasma polymer films prepared from tetravinylsilane monomer

TRIVEDI, R. ŠKODA, D. ČECH, V.

Originální název

AFM and nanoindentation analysis of plasma polymer films prepared from tetravinylsilane monomer

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The study of surface morphology and mechanical properties of plasma polymer films was carried out. The film was prepared from tetravinylsilane monomer by plasma-enhanced chemical vapor deposition (PECVD) employing an RF helical coupling system. The RF power and deposition time were varied for the deposited films of around 1 micron thickness, which was measured by spectroscopic ellipsometry.

Klíčová slova

plasma polymerization, surface morphology, AFM, nanoindentation

Autoři

TRIVEDI, R.; ŠKODA, D.; ČECH, V.

Rok RIV

2007

Vydáno

13. 12. 2007

Strany od

1

Strany do

2

Strany počet

2

BibTex

@inproceedings{BUT28347,
  author="Rutul Rajendra {Trivedi} and David {Škoda} and Vladimír {Čech}",
  title="AFM and nanoindentation analysis of plasma polymer films prepared from tetravinylsilane monomer",
  booktitle="New Perspectives of Plasma Science and Technology (CD medium)",
  year="2007",
  pages="1--2"
}