Detail publikace
Mechanical properties of plasma polymer films
ČECH, V. STUDÝNKA, J. ČECHALOVÁ, B. MISTRÍK, J. ZEMEK, J.
Originální název
Mechanical properties of plasma polymer films
Typ
článek ve sborníku ve WoS nebo Scopus
Jazyk
angličtina
Originální abstrakt
Plasma polymer films were deposited from vinyltriethoxysilane monomer on polished silicon wafers at selected deposition conditions using pulsed plasma (PECVD). Nanoindentation measurements were carried out in order to analyze selected mechanical properties of deposited films. Depth profile of the Young's modulus was discussed with respect to ellipsometric data, surface morphology measured by AFM, and chemical analyses.
Klíčová slova
mechanical properties
Autoři
ČECH, V.; STUDÝNKA, J.; ČECHALOVÁ, B.; MISTRÍK, J.; ZEMEK, J.
Rok RIV
2007
Vydáno
13. 12. 2007
Strany od
1
Strany do
5
Strany počet
5
BibTex
@inproceedings{BUT28342,
author="Vladimír {Čech} and Jan {Studýnka} and Božena {Čechalová} and Jan {Mistrík} and Josef {Zemek}",
title="Mechanical properties of plasma polymer films",
booktitle="Lokální mechanické vlastnosti",
year="2007",
pages="1--5"
}