Detail publikačního výsledku

Optical constants of plasma-polymerized tetravinylsilane films

ČECHALOVÁ, B.; STUDÝNKA, J.; ČECH, V.

Originální název

Optical constants of plasma-polymerized tetravinylsilane films

Anglický název

Optical constants of plasma-polymerized tetravinylsilane films

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

We have focused on the optical properties of thin plasma-polymerized films deposited from a mixture of tetravinylsilane and oxygen gas and evaluated by means of spectroscopic ellipsometry. The RF effective power of pulsed plasma and the oxygen/total flow rate ratio were varied in broad range. We found a clear link between the RF effective power used and optical properties (refractive index, extinction coefficient, band gap) of the films.

Anglický abstrakt

We have focused on the optical properties of thin plasma-polymerized films deposited from a mixture of tetravinylsilane and oxygen gas and evaluated by means of spectroscopic ellipsometry. The RF effective power of pulsed plasma and the oxygen/total flow rate ratio were varied in broad range. We found a clear link between the RF effective power used and optical properties (refractive index, extinction coefficient, band gap) of the films.

Klíčová slova

plasma polymerization, optical properties, ellipsometry

Klíčová slova v angličtině

plasma polymerization, optical properties, ellipsometry

Autoři

ČECHALOVÁ, B.; STUDÝNKA, J.; ČECH, V.

Vydáno

13.12.2007

ISBN

978-4-9903773-2-8

Kniha

18th International Symposium on Plasma Chemistry

Strany od

1

Strany do

4

Strany počet

4

BibTex

@inproceedings{BUT28338,
  author="Božena {Čechalová} and Jan {Studýnka} and Vladimír {Čech}",
  title="Optical constants of plasma-polymerized tetravinylsilane films",
  booktitle="18th International Symposium on Plasma Chemistry",
  year="2007",
  pages="1--4",
  isbn="978-4-9903773-2-8"
}