Detail publikace

Optical constants of plasma-polymerized tetravinylsilane films

ČECHALOVÁ, B. STUDÝNKA, J. ČECH, V.

Originální název

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

We have focused on the optical properties of thin plasma-polymerized films deposited from a mixture of tetravinylsilane and oxygen gas and evaluated by means of spectroscopic ellipsometry. The RF effective power of pulsed plasma and the oxygen/total flow rate ratio were varied in broad range. We found a clear link between the RF effective power used and optical properties (refractive index, extinction coefficient, band gap) of the films.

Klíčová slova

plasma polymerization, optical properties, ellipsometry

Autoři

ČECHALOVÁ, B.; STUDÝNKA, J.; ČECH, V.

Rok RIV

2007

Vydáno

13. 12. 2007

ISBN

978-4-9903773-2-8

Kniha

18th International Symposium on Plasma Chemistry

Strany od

Strany do

Strany počet

BibTex

@inproceedings{BUT28338,
  author="Božena {Čechalová} and Jan {Studýnka} and Vladimír {Čech}",
  title="Optical constants of plasma-polymerized tetravinylsilane films",
  booktitle="18th International Symposium on Plasma Chemistry",
  year="2007",
  pages="1--4",
  isbn="978-4-9903773-2-8"
}