Detail publikace

Physical versus chemical properties of plasma-polymerized a-SiOC:H films

ČECH, V. STUDÝNKA, J. ČECHALOVÁ, B. JONES, F. PEŘINA, V. ZEMEK, J.

Originální název

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

Plasma-polymerized a-SiOC:H films were deposited from a mixture of tetravinylsilane vapor and oxygen gas at different power (0.1-10 W) and oxygen-to-total flow rate ratio (0-0.79). The Young's modulus, hardness, refractive index, extinction coefficient, and band gap of the plasma polymer were found to be controlled by the ratio between the content of carbon and oxygen atoms in films.

Klíčová slova

thin film, mechanical properties, optical properties, chemical properties

Autoři

ČECH, V.; STUDÝNKA, J.; ČECHALOVÁ, B.; JONES, F.; PEŘINA, V.; ZEMEK, J.

Rok RIV

2007

Vydáno

13. 12. 2007

ISBN

978-4-9903773-2-8

Kniha

18th International Symposium on Plasma Chemistry

Strany od

Strany do

Strany počet

BibTex

@inproceedings{BUT28336,
  author="Vladimír {Čech} and Jan {Studýnka} and Božena {Čechalová} and Frank {Jones} and Vratislav {Peřina} and Josef {Zemek}",
  title="Physical versus chemical properties of plasma-polymerized a-SiOC:H films",
  booktitle="18th International Symposium on Plasma Chemistry",
  year="2007",
  pages="1--4",
  isbn="978-4-9903773-2-8"
}