Detail publikace

Nanoindentation measurements of plasma polymer films

ČECH, V. STUDÝNKA, J. JONES, F.

Originální název

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

Mechanical properties of thin films deposited from a mixture of tetravinylsilane vapor and oxygen gas by plasma-enhanced chemical vapor deposition were investigated using nanoindentaion. The Young's modulus and hardness of the film increased with enhanced RF power while a significant rise of oxygen concentration in the film resulted in descent of mechanical constants.

Klíčová slova

nanoindentation, plasma polymerization, thin film

Autoři

ČECH, V.; STUDÝNKA, J.; JONES, F.

Rok RIV

2007

Vydáno

13. 12. 2007

ISBN

978-4-9903773-2-8

Kniha

18th International Symposium on Plasma Chemistry

Strany od

Strany do

Strany počet

BibTex

@inproceedings{BUT28335,
  author="Vladimír {Čech} and Jan {Studýnka} and Frank {Jones}",
  title="Nanoindentation measurements of plasma polymer films",
  booktitle="18th International Symposium on Plasma Chemistry",
  year="2007",
  pages="1--4",
  isbn="978-4-9903773-2-8"
}