Detail publikace

Capacitive coupling plasma system for thin film deposition

Přikryl, R., Čech, V., Hedbavny, P.

Originální název

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

Plasma polymerization is a powerful tool for deposition of thin films whose physicochemical properties can be controlled in wide ranges and thus the technology enables tailoring of the material with respect to an application. However, a success of the coating technique depends on a suitable technological system, as the vacuum quality and film reproducibility are the crucial parameters. We have developed a new capacitive coupling system for creative design and application of complex film systems in smart materials. The internal setup of our deposition chamber using plan-parallel electrodes was derived from a typical capacitive coupling system, but our apparatus was equipped with many non-standard components.

Klíčová slova

PECVD, plasma technology, capacitive coupling system

Autoři

Přikryl, R., Čech, V., Hedbavny, P.

Rok RIV

2004

Vydáno

1. 1. 2004

Místo

Turecko

Strany od

Strany do

Strany počet

BibTex

@inproceedings{BUT17609,
  author="Radek {Přikryl} and Vladimír {Čech} and Pavel {Hedbavny}",
  title="Capacitive coupling plasma system for thin film deposition",
  booktitle="Plasma Polymers and Related Materials",
  year="2004",
  pages="4",
  address="Turecko"
}