Detail publikace

Determination of elastic parameters of Si3N4 thin films by means of a numerical approach and bulge tests

TINOCO NAVARRO, H. HOLZER, J. PIKÁLEK, T. BUCHTA, Z. LAZAR, J. CHLUPOVÁ, A. KRUML, T. HUTAŘ, P.

Originální název

Determination of elastic parameters of Si3N4 thin films by means of a numerical approach and bulge tests

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

This paper describes and applies a methodology to determine the elastic properties of freestanding thin membranes by means of a bulge test and a numerical approach. The numerical procedure is based on the combination of two standard methods i.e. finite element analysis and classical analytical solutions to calculate elastic properties of thin films. Bulge tests were conducted on silicon nitride (Si3N4) monolayer of 2 x 2 mm (square) and 3.5 x 1.5mm (rectangular) membranes with the aim to determine elastics properties (Young's modulus (E) and Poison's ratio (v)) that define the load-deflection curves of both membranes. With this purpose, an error function was constructed for each membrane which involved finite element solutions, analytical solutions and experimental measurements. Error functions were found and minimized by mapping a set of elastic parameters for the two membranes (square and rectangular). A unique solution was determined in the intersection of both linear approximations, obtaining 236 GPa for E and 0.264 for v. It is well known that in a traditional bulge test analysis only one of both biaxial modulus can be determined and not a combination of E and v. Numerical results show that calculated load-deflection curves agree well with the measurements obtained for both square and rectangular membranes experimentally. The proposed methodology is only applicable in thin films with elastic behavior, however generalization for more complicated geometries is possible.

Klíčová slova

Elastic properties; Bulge test; Thin film; Finite element analysis; Silicon nitride

Autoři

TINOCO NAVARRO, H.; HOLZER, J.; PIKÁLEK, T.; BUCHTA, Z.; LAZAR, J.; CHLUPOVÁ, A.; KRUML, T.; HUTAŘ, P.

Vydáno

15. 2. 2019

Nakladatel

ELSEVIER SCIENCE SA

Místo

LAUSANNE

ISSN

0040-6090

Periodikum

Thin Solid Films

Ročník

672

Číslo

1

Stát

Nizozemsko

Strany od

66

Strany do

74

Strany počet

9

URL

https://www.sciencedirect.com/science/article/pii/S0040609018308484

BibTex

@article{BUT162252,
  author="Hector Andres {Tinoco Navarro} and Jakub {Holzer} and Tomáš {Pikálek} and Zdeněk {Buchta} and Josef {Lazar} and Alice {Chlupová} and Tomáš {Kruml} and Pavel {Hutař}",
  title="Determination of elastic parameters of Si3N4 thin films by means of a numerical approach and bulge tests",
  journal="Thin Solid Films",
  year="2019",
  volume="672",
  number="1",
  pages="66--74",
  doi="10.1016/j.tsf.2018.12.039",
  issn="0040-6090",
  url="https://www.sciencedirect.com/science/article/pii/S0040609018308484"
}