Detail publikace

Film Thickness Measurement and Surface Characterization by Optical Profilometer MicroProf FRT

SIDEROV, V. MLADENOVA, D. MILENKOV, V. OHLÍDAL, M. SALYK, O. WEITER, M. ZHIVKOV, I.

Originální název

Typ

abstrakt

Jazyk

angličtina

Originální abstrakt

This paper compares Chromatic White Light (CWL) and stylus profilometer measurements in an attempt to determine the capabilities of the non-contact CWL method for thickness measurements of thin soft organic films. It was found that the CWL technique is proper for a measurement of thin soft organic films with higher than 40-50 nm film thicknesses. As a complementary feature of the method 2D and 3D surface morphology imaging of the films were recorded and processed by digital calculations and Fourier filtering.

Klíčová slova

Chromatic White Light, Thin Soft Organic Films, Film Thickness Measurement

Autoři

SIDEROV, V.; MLADENOVA, D.; MILENKOV, V.; OHLÍDAL, M.; SALYK, O.; WEITER, M.; ZHIVKOV, I.

Vydáno

17. 10. 2013

Strany od

Strany do

Strany počet

BibTex

@misc{BUT102465,
  author="Vasil {Siderov} and Daniela {Mladenova} and Viktor {Milenkov} and Miloslav {Ohlídal} and Ota {Salyk} and Martin {Weiter} and Ivaylo {Zhivkov}",
  title="Film Thickness Measurement and Surface Characterization by Optical Profilometer MicroProf FRT",
  booktitle="Jubilee Scientific Session {"}Interdisciplinaty Chemistry{"}",
  year="2013",
  pages="48--48",
  note="abstract"
}